GB/T 32816-2016
硅基MEMS制造技术 以深刻蚀与键合为核心的工艺集成规范
Silicon-based MEMS fabrication technology—Specification for criterion of the combination of the deep etching and bonding process
- 实施日期
- 2017-03-01
- ICS 分类
- 31.200
组合使用关键词、标准类型、状态与 ICS 分类,快速定位所需国家标准。
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GB/T 32816-2016
Silicon-based MEMS fabrication technology—Specification for criterion of the combination of the deep etching and bonding process
GB/T 32814-2016
Silicon-based MEMS fabrication technology—Specification for criterion of the SOI wafer based MEMS process
GB/T 16525-2015
Semiconductor integrated circuits—Specification of leadframes for plastic leaded chip carrier package
GB/T 15878-2015
Semiconductor integrated circuits—Specification of leadframes for small outline package
GB/T 15876-2015
Semiconductor integrated circuits—Specification of leadframes for plastic quad flat package
GB/T 14112-2015
Semiconductor integrated circuits—Specification for stamped leadframes of plastic DIP
GB/T 15877-2013
Semiconductor integrated circuits—Specification of DIP leadframes produced by etching
GB/T 20296-2012
Mnemonics and symbols for integrated ciruuits
GB/T 28277-2012
Silicon-based MEMS fabrication technology - Measurement method of cutting and pull-press strength of micro bonding area
GB/T 28276-2012
Silicon-based MEMS fabrication technology - Specification for the dissolved wafer process
GB/T 28275-2012
Silicon-based MEMS fabrication technology - Specification for KOH etch process
GB/T 28274-2012
Silicon-based MEMS fabrication technology - The basic regulation of layout design
GB/T 26113-2010
Micro-electromechanical system technology - General rules for the assessment of micro-geometrical parameters
GB/T 26112-2010
Micro-electromechanical system technology - General rules for the assessment of micro-mechanical parameters
GB/T 26111-2010
Micro-electromechanical system technology - Terms
GB/T 17574.9-2006
Semiconductor devices - Integrated circuits - Part 2-9: Digital integrated circuits - Blank detail specification for MOS ultraviolet light erasable electrically programmable read-only memories
GB/T 17574.20-2006
Semiconductor devices - Integrated circuits - Part 2-20:Digital integrated circuits - Family specification - Low voltage integrated circuits
GB/T 17574.11-2006
Semiconductor devices - Integrated circuits - Part 2-11: Digital integrated circuits - Blank detail specification for single supply integrated circuit electrically erasable and programmable read-only memory
GB/T 20515-2006
Semiconductor devices - Integrated circuits - Part 5: Semicustom integrated circuits
GB/T 12750-2006
Semiconductor devices―Integrated circuits―Part 11: Sectional specification for semiconductor integrated circuits excluding hybrid circuits